Microelectromechanical systems (MEMS) pressure sensors have been designed and characterized. Initially deflection, stress and strain of the pressure sensor are computed based on mechanics of diaphragm structure for circular shape in accordance with the theory of elasticity. The results have been simulated to define and understand the importance of various impact parameters such as sensitivity, optimization of resistor length etc. Moreover the present work also demonstrates the design of MEMS pressure sensor using solidworks. It allows detailed visualization of the parameters computed and supports the theory undertaken. © 2014, Springer-Verlag Berlin Heidelberg.