The ELID-MRF process chain might be used efficiently for finishing precision optical components with complex geometry and stringent specifications. In this study, ELID ground samples were analyzed in order to know the feasibility for precision finishing with MRF. The samples were examined for low frequency form error and mid and high frequency surface errors. In addition, the subsurface damages were also analyzed. The analyses show that the ELID ground samples were free from mid spatial frequency error. Mirror surface finish with SSD less than one micrometer was also achieved. However, the form accuracy required for the MRF process was difficult to achieve due to the influence of several factors such as machine inaccuracy and wheel wear. © 2008 Optical Society of America.