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Analytical comparison of circular diaphragm based simple, single and double touch mode - MEMS capacitive pressure sensorPublished in American Institute of Physics Inc.
2016
DOI: 10.1063/1.4942700
Volume: 1715
In this paper a comparative study is done between normal capacitive pressure sensor, a touch mode capacitive pressure sensor and a double touch mode capacitive pressure sensor. The diaphragm in use is of circular shape. The theory and underlying equations has been described for the said devices and then simulations have been done for different performance parameters to understand the advantage of one over the other. © 2016 AIP Publishing LLC.
Topics: Diaphragm (mechanical device) (63)%63% related to the paper
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About the journal
| Journal | Data powered by TypesetAIP Conference Proceedings |
|---|---|
| Publisher | Data powered by TypesetAmerican Institute of Physics Inc. |
| ISSN | 0094243X |
Authors (1)
Sumit Kumar Jindal- Design of an Autonomous drone for IoT deployment analysis
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