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Atomic Force Microscopy as a Nanometrology Tool: Some Issues and Future Targets
Published in Springer Science and Business Media LLC
2013
Volume: 28
   
Issue: 4
Pages: 311 - 319
Abstract
Diverse novel nanomaterials are being developed for a wide range of applications nowadays. Atomic force microscopy (AFM) assumes specific importance for the measurement of size and other related properties for such nanomaterials. The different aspects related to AFM modes of operation, nanopositioning, sensing systems as well as calibration for reliable characterization in order to meet the nanometrology requirements are discussed. The future targets in this context, set by nanometrology institutes, are also highlighted. © 2013 Metrology Society of India.
About the journal
JournalData powered by TypesetMAPAN
PublisherData powered by TypesetSpringer Science and Business Media LLC
ISSN0970-3950
Open Access0