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Book Chapter
Characterising Etching Processes in Bulk Micromachining
Bag S.K.
Published in Springer-Verlag
DOI:
10.1007/3-540-29339-6_5
Pages: 83 - 105
Topics:
Bulk micromachining
(74)%
74% related to the paper
,
Surface micromachining
(71)%
71% related to the paper
and
Etching (microfabrication)
(62)%
62% related to the paper
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Characterising Etching Processes in Bulk Micromachining
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References (29)
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Micromanufacturing and Nanotechnology
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Springer-Verlag
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