XY positioning stages are fundamental components during precision manipulation of micro sized objects. A compliant mechanism based mechanism is the appropriate choice for the design of XY stage. Topology optimization techniques are utilized to design the compliant mechanism. During the process of topology optimization, senseless regions are appearing from the manufacturability perspective. Senseless regions are staircase boundaries and node to node connectivity which is impossible to manufacture. Interpolation function is included in the topology optimization to minimize the effect of senseless regions. However topologically developed design is post processed to attain the manufacturability. Structural performance of the post processed final design is validated through Finite Element Method (FEM) and experimental technique. © (2014) Trans Tech Publications, Switzerland.