This paper is mainly focused on the optimization of the micromachined heater for gas sensing applications designed to withstand high-temperature. Different microheater geometries and dimensions have been investigated regarding their power consumption, temperature distribution over the sensing area and robustness when annealed at high temperature. The designed microheater withstood annealing temperatures of up to 700°C and moreover robustness of the silicon nitride membrane allowed the sensing area to be heated up to a high temperature 400-700°C. © 2010 IEEE.

Velmathi G

Electronics

School of Electronics Engineering

Chennai Campus

N. Ramshanker

S. Mohan

Vellore Institute of Technology (VIT) is a private university located in&nbsp;Tamil Nadu, India. Founded in 1984, as Vellore Engineering College, the institution offers 20 undergraduate, 34 postgraduate, four integrated and four research programs. It has campuses in Vellore, Amravati, Bhopal and Chennai.

VIT is one of the top ranked private universities in India according to NIRF, THE and QS Rankings.&nbsp;Govt. of India has recognized&nbsp;VIT, Vellore as an&nbsp;Institution of Eminence. This has allowed VIT to take independent quality initiatives and move up in world ranking.

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VIT University

Design, Electro-Thermal simulation and geometrical optimization of double spiral shaped microheater on a suspended membrane for gas sensing

IECON Proceedings (Industrial Electronics Conference)

Design, electro-thermal simulation and geometrical optimization of double spiral shaped microheater on a suspended membrane for gas sensing