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Double Side Coating of DLC on Silicon by RF-PECVD for AR Application
Niranjan Reddy K, Varade A, , Joshua J, Sasen D, Chellamalai M, Shashi Kumar P.V.
Published in Elsevier BV
Volume: 97
Pages: 1416 - 1421
About the journal
JournalData powered by TypesetProcedia Engineering
PublisherData powered by TypesetElsevier BV
Open AccessYes