SU-8, an epoxy based polymer is a promising material for fabricating MEMS 3D structures. However, they have poor tribological properties, which needs to be addressed for optimal performance. Many researchers have shown that PTFE (polytetrafluoroethylene) has low coefficient of friction, and Talc is been used for better wear durability; and hence this combination with any of the polymers has never been studied. To enhance the mechanical and tribological properties of SU-8, different weight percentage of Talc and PTFE concentration has been studied; and the results have shown that the right weight percentage of these two fillers (10P10T) have provided superior properties (Improved hardness and young's modulus with reduced friction coefficient) compared to pure SU-8 and hence can be used as coatings in MEMS devices that experiences lower contact stresses. © TJPRC Pvt. Ltd.