The article aims to analyze the use of different compensation structures in MEMS micromachining technology to determine the minimum release time as fast as possible where undercutting is desirable. A high undercutting rate is advantageous for the formation of suspended structures. Thus, the implication of the present research includes analysis of corner undercutting behavior, their etching time, and etching characteristics using KOH and TMAH etchants. In this paper, the effective time and etchant concentration are studied using 33% KOH at 80, °C and 25% TMAH at 85, °C. It is found that wide bar with slit structure is the best compensation structure with minimum space competence. © Springer Nature Singapore Pte Ltd. 2018.