The demand for multifunctional micro parts is an ever increasing need for product miniaturization. Amongst the spectrum of micro manufacturing processes, Electro-Discharge Deposition (EDD) is a newly developing additive process to produce parts in micro scale. In EDD the tool and workpiece electrodes are connected to reverse polarity in order to remove material from anode which deposits on cathode surface. The advantage of EDD is, any conducting tool material can be deposited irrespective of its hardness on the specified conducting substrate. So far, limited work has been carried out to develop micro parts like micro cylinders, micro spiral structures, etc., by EDD. In this work an attempt has been made to study the effect of various process parameters like current, duty cycle, pulse on time, voltage and table feed rate in EDD using central composite rotatable design (CCRD). It is found from the experimental results that, current plays a significant role in deposition of tool material. Copyright © 2013 by ASME.