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Growth of GaN nano-column on Si (111) substrate using Au+Ga alloy seeding by pulsed flow method using MOCVD
J.-C. Song, D.-H. Kang, S.-H. Lee, E.-S. Jang, D.-W. Kim, , C.-R. Lee
Published in Trans Tech Publications
2008
Volume: 31
   
Pages: 108 - 110
Abstract
Vertical GaN nano-columns arrays were grown on Au-coated silicon (111) substrate by Au+Ga alloy seeding method and pulsed flow of Gallium and ammonia using metalorganic chemical vapor deposition (MOCVD). A gold thin film was deposited on Si using an ion coating system. The Au coated Si substrate was annealed at 800°C under hydrogen ambient for 5 min. The pre-deposition of gallium and nitrogen was performed for 60 sec to form Au+Ga and nitrogen solid solution, which acts as the initial nucleation islands. Then Gallium and ammonia were let in pulse method. Scanning electron microscopy (SEM) image reveals a vertical growth and cylindrical in shape GaN nano-column. From the sharp PL peak intensity it is clearly seen that the dislocation density is reduced considerably and the optical quality of the nano-column is improved.
About the journal
JournalAdvanced Materials Research
PublisherTrans Tech Publications
ISSN10226680