InN nanocolumns were grown on a gold-coated Si(111) substrate by metal-organic chemical vapor deposition (MOCVD). Herein, indium predeposition was performed before InN nanocolumn growth. The InN nanocolumns were obtained by forming Au+In solid solution droplets on the Au-coated substrate and subsequently nitriding these droplets. In this study, we investigated the morphological properties of InN nanocolumns by changing the growth conditions such as growth temperature, trimethylindium (TMI) flow rate, and growth pressure. Scanning electron microscopy (SEM) showed that the InN nanocolumns were hexagonal with diameters ranging from 90 to 180nm and a length of approximately 2.5 μm. The Raman spectrum of the InN nanocolumns showed peaks at 492 and 596cm-1, which were assigned to E2 and A 1 longitudinal optical (LO) phonon modes of InN, respectively. From the high-resolution X-ray diffraction (HR-XRD) spectrum, the predominant diffraction pattern from the InN(101) plane was observed at 33.215°. © 2009 The Japan Society of Applied Physics.