Microelectromechanical system-based capacitive pressure sensors have seen significant advancements in modeling and design. This paper provides a complete analysis of a novel improvement to existing models of the touch mode capacitive pressure sensor. An in-depth, step-by-step derivation of the capacitance, capacitive sensitivity and mechanical sensitivity is examined for the double-sided touch mode capacitive pressure sensor. The results generated are modeled and examined using MATLAB. Comparisons with previous models clearly delineate the improved performance in terms of capacitance and sensitivity. The analysis conducted dovetail perfectly with the modeled results. © 2017, Springer Science+Business Media, LLC.

Sumit Kumar Jindal

Department of Embedded Technology

School of Electronics Engineering

Vellore Campus

Varma M.A

Thukral D

Vellore Institute of Technology (VIT) is a private university located in&nbsp;Tamil Nadu, India. Founded in 1984, as Vellore Engineering College, the institution offers 20 undergraduate, 34 postgraduate, four integrated and four research programs. It has campuses in Vellore, Amravati, Bhopal and Chennai.

VIT is one of the top ranked private universities in India according to NIRF, THE and QS Rankings.&nbsp;Govt. of India has recognized&nbsp;VIT, Vellore as an&nbsp;Institution of Eminence. This has allowed VIT to take independent quality initiatives and move up in world ranking.

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VIT University

Journal of Computational Electronics

Pressure is a key unit of measure in aerospace industries. Spontaneous precise measurement of pressure has to be compassed at locations where it is futile and impractical to couple the pressure responsive constituent to the conditional electronics or computational circuit by practicing standard cables and measurements prone to harsh environment. This paper introduces the design of a wireless pressure-monitoring system for aerospace applications in harsh environment. Traditionally, applied pressure deflects a delicate silicon diaphragm, altering the capacitance developed between it and metal electrode firm on a substrate. The LC circuit translates the pressure variation into the LC resonant frequency shift. This change is sensed remotely by virtue of inductance coupling, expelling the compulsion for wire connection rooted telemetry circuits. Novelty of our work rests in the fact that contrary to examining shift in the resonant frequency due to the applied pressure, we have put in effort to maintain resonant shifting equal to zero by varying the capacitance at the observer unit. This will allow pressure variations to be measured directly in terms of the capacitance variation at a fixed resonant frequency, which is 7.92 MHz in our context. According to the application domain (avionics), the proposed sensor structure is designed for functioning in the pressure range between (100 and 1140) mbar. The choice of design values for sensor parameters has been validated. The sensitivity is measured to be 1.746e−17 F/Pa over specified linear range which is shown to match a theoretical estimate realized by mathematical model. An in-depth, step by step derivation of performance parameters to achieve above-stated objective is shown for sensor under study. The results generated are modelled and examined using MATLAB. The analysis conducted dovetail perfectly with the modelled results.

Fulltext

Measurement and Control

An inductive-capacitive-circuit-based micro-electromechanical system wireless capacitive pressure sensor for avionic applications: Preliminary investigations, theoretical modelling and simulation examination of newly proposed methodology

Micro-electro mechanical systems (MEMS) designing is used to produce component having very small dimensions. In this paper, MEMS-based pressure sensors working using the capacitive sensing technique are worked upon. Furthermore, using neural networks the voltage output produced is linearized. This decreases the non-linearity error. One possible limitation of this electrical circuit is the inability to be used in high temperature regions. This limitation has been overcome by implementing an electro-optic technique by means of which the electrical signal is converted to optical signal. This novelty does not only give the added benefit of being able to be used in inflammable regions but also eases transmission in remote locations. This is done by Mach-Zehnder interferometer whose simulations of intensity variation are studied using OptiBPM software. © 2001-2012 IEEE.

IEEE Sensors Journal

Design and Analysis of MEMS Pressure Transmitter Using Mach–Zehnder Interferometer and Artificial Neural Networks

Microsystem Technologies

Capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modelling and simulation

A complete analytical model for clamped edge circular diaphragm non-touch and touch mode capacitive pressure sensor

A complete analytical model for circular diaphragm pressure sensor with freely supported edge

Sensors and Actuators A: Physical

Analysis of small deflection touch mode behavior in capacitive pressure sensors

IEEE Transactions on Components and Packaging Technologies

Capacitive Pressure Sensor With Very Large Dynamic Range

Investigation of the influence of double-sided diaphragm on performance of capacitance and sensitivity of touch mode capacitive pressure sensor: numerical modeling and simulation forecasting

Journal	Data powered by TypesetJournal of Computational Electronics
Publisher	Data powered by TypesetSpringer Science and Business Media LLC
ISSN	1569-8025
Open Access	0