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Laser-Based Fabrication of Microstructures on Nickel Thin Films and Its Applications in On-Chip Thin Film Inductors
, V. Borra, D.G. Georgiev
Published in Institute of Electrical and Electronics Engineers Inc.
Volume: 19
Pages: 455 - 460
This work reports on the fabrication of microbump structures on nickel (Ni) films by single-pulse, localized laser irradiation. Conditions for the reproducible formation of such microstructures have been identified in terms of laser-irradiation and film parameters after systematic studies involving a relevant parameter space. Ni films deposited by vacuum evaporation were found to be better suited for reproducible laser microstructuring because they lack the typical cracks and voids morphology of sputtered films. The continuous and smooth nature of the evaporated films facilitated a radially symmetric heat flow propagation upon laser irradiation, which then resulted in a complex combination of thermal expansion, deformation, and other processes leading to a high yield of microstructures. An improvement in the inductance and the quality factor of on-chip spiral inductors, incorporating such laser-microstructured ferromagnetic nickel thin films was observed, which demonstrates the potential of such a laser-based method for fabrication or fine tuning of various micro-/nano-electric/electronic sensor and other components and systems. © 2002-2012 IEEE.
About the journal
JournalData powered by TypesetIEEE Transactions on Nanotechnology
PublisherData powered by TypesetInstitute of Electrical and Electronics Engineers Inc.