Header menu link for other important links
X
Laser patterning of thin film copper and ITO on flexible substrates for terahertz antenna applications
, S.B. Suseela, R. Sankararajan, A. Gupta, G. Rana, S. Prabhu
Published in Japan Laser Processing Society
2017
Volume: 12
   
Issue: 3
Pages: 313 - 320
Abstract
This work demonstrates the functioning of creating a micro-scale patch structure in copper and optically transparent Indium Tin Oxide thin film by a mode-locked 20ns and 650ps laser pulses with 1064nm and 532nm wavelength respectively. The proposed device uses Cu and ITO as conducting patches. A thin film of 0.4 micron Cu and 0.125micron ITO was deposited on Polyimide and PET substrate respectively. The crystalline of the deposited Cu and ITO films have been discussed. It is clear that the ablation threshold is dependent on applied power, pulse width, and scanning speed. The analysis of the results has been done using Scanning Electron Microscope, an Optical Profiler, and a white line interferometer. The ablation depth of the patch profiles was analyzed through an optical profiler. The temperature rise in the ITO by the applied laser pulse has been studied using FEM simulation and the laser ablation of ITO film from PET substrate by the delamination process was observed. The created structure finds application in Terahertz Antenna in making infrared detector and the performance metrics of the developed structures are studied using EM simulation software. The resonance nature of the fabricated structure has been validated experimentally by THz-TDS technique.
About the journal
JournalJournal of Laser Micro Nanoengineering
PublisherJapan Laser Processing Society
ISSN18800688