The novel results in the field of measurements of very small capacitance changes are presented. The operating principles like double differential principle, RC phase delay, charging and discharging, oscillator, capacitance to phase angle conversion used for measuring very small capacitance changes are discussed. The basic and most important parameters of measurements are dealt with measurement range, sensitivity, percentage error and applications where it can be used. The aim is to provide an elaborative summary on various methods and their parameters available for capacitance measurement. © 2013 IFSA.