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MEMS based piezoresistive pressure sensor design of circular membrane with annularly grooves and center mass for measurements of low pressure
Hirwani J, Sahay R,
Published in IEEE
The MEMS based piezoresistive pressure sensor presented in this paper utilizes a novel circular bossed diaphragm structure with annular grooves for low pressure measurements. An attempt has been made to alleviate the trade-off between sensitivity and linearity hence obtaining an improved sensor performance.The performance parameters such as stress and membrane deflection have been analysed using the Finite element model (FEM). The novel structure is characterised by annular grooves which provide a considerably high value of sensitivity of 22.84 mv/kPa and a central mass which partially stiffens the membrane to provide reduced deflection and hence non-linearity. The proposed sensor possesses advantages like micro dimension, low nonlinearity, high sensitivity and a stable dynamic behaviour. The proposed structure hence proves to be ideal for low pressure applications below 5KPa. © 2019 IEEE.
About the journal
JournalData powered by Typeset2019 International Conference on Vision Towards Emerging Trends in Communication and Networking (ViTECoN)
PublisherData powered by TypesetIEEE
Open Access0