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Microstructuring of su-8 resist for mems and bio-applications
P.K. Dey, B. Pramanick, , P. Ganguly, S. Das
Published in Exeley Inc
Volume: 3
Issue: 1
Pages: 118 - 129
Some studies on the fabrication of micro-needles, micro-pillers, and micro-channels using SU-8 negative photoresist for MEMS and bio-applications are reported. The SU-8 processing technology was standardized for the purpose. Micro-pillars were fabricated on SU-8 polymer by soft lithographic technique. Micro-needles were realized on SU-8 film utilizing lensing effect of the etched groove structure of the glass substrate. Micro-channel was fabricated by molding of PDMS polymer on patterned SU-8 ridge structure. Structural characterization of the fabricated structures were investigated using optical microscope and SEM.
About the journal
JournalInternational Journal on Smart Sensing and Intelligent Systems
PublisherExeley Inc