SU-8 negative resist and polydimethylsiloxane (PDMS) elastomer are widely used for the development of any polymer based flexible biosensors. Although SU8 based sensors are easier to realize through photolithography technique, PDMS is a better counterpart with enhanced sensitivity and biocompatibility for detecting various analytes and in the realization of implantable/semi-implantable flexible biosensors and energy harvesting devices. However, incompatibility of PDMS towards microdevice realization using photolithography process posses a great limitation. Present work explores 3D micropatterning of PDMS surface through customized wet etching technique using N-methyl-2-pyrrolidone (NMP) and tetra-n-butylammonium fluoride (TBAF) using Kapton tape as a novel hard mask. The process flow involves incorporation of novel sacrificial layers of positive photoresist to realize free hanging 3D micro-structures of PDMS and PVA layer for spontaneous release of the polymeric microstructure after device realization. © 2019 IEEE.