Machine learning facilitates predictive maintenance due to the advantages it holds over traditional methods of maintaining semi-conductor devices such as preventive and breakdown maintenance. Several predictive models using machine learning on the Semiconductor Manufacturing process dataset (SECOM) will be applied in this paper. The dataset contains the information related to semiconductor manufacturing process, with the attributes corresponding to signals collected from semiconductor devices. Due to the high-dimensionality of the data and class imbalance problem in the SECOM dataset, it poses several challenges related to data pre-processing, which is an essential step incorporated in this work while applying various machine learning models. Comparison and analysis of various predictive machine learning classification models were carried out based on the performance metrics like, accuracy and Receiver Operating Characteristic (ROC) curve. © Published under licence by IOP Publishing Ltd.