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Simulation Studies on Energy Harvesting Characterisitcs and Storage Analysis Through Microcantilever Vibration
Solleti R.T, Harikrishna K,
Published in World Scientific Pub Co Pte Lt
Volume: 17
Issue: 01n02
Vibrations can be a good source of energy and can be harvested and utilized by simple design and fabrication using the MEMS technology. Energy harvesting provides unending sources of energy for low-power electronics devices where the use of batteries is not feasible. Piezoelectric energy harvesters are widely considered because of their compact design, compatibility to MEMS devices and ability to respond to a wide range of frequencies freely available in the environment. In this project, a rectangular model for cantilever-based piezoelectric energy harvester is proposed with different designs like two layer, two layer with proof mass, four layer and four layer with proof mass designed with dimensions as 50[Formula: see text][Formula: see text]m[Formula: see text][Formula: see text][Formula: see text]50[Formula: see text][Formula: see text]m[Formula: see text][Formula: see text][Formula: see text]1[Formula: see text][Formula: see text]m for each layer using COMSOL Multiphysics 5.0. Simulation results were obtained using silicon as substrate, aluminium as electrodes and PZT-5H and ZnO as piezoelectric materials and the respective stress and voltages were obtained by applying a force acting on foot, train, roller coaster and a general value of 10[Formula: see text]N/m2 on top of the cantilever. The effects of varying geometrical dimensions of the device were also investigated.
About the journal
JournalInternational Journal of Nanoscience
PublisherWorld Scientific Pub Co Pte Lt
Open Access0