Highly sensitive MEMS capacitive pressure sensor is nowadays used for many different applications such as aerospace, automobile, Bio-MEMS etc. This paper deals with study and comparison of different types of materials that can be used in design of MEMS capacitive pressure sensor. Initially principle and design of basic MEMS capacitive pressure sensor is explained. In the next section the properties of different materials is elaborated. The centre deflection of the diaphragm is calculated using COMSOL Multiphysics and Capacitance is calculated using MATLAB simulation. From the capacitance calculated sensitivity of the materials can be interpreted. The analysis is carried out for a pressure range of 0 to 0.1 MPa. © 2016 Author(s).