Copious research has been conducted on Capacitive Pressure Sensors over the decades with a focus on Silicon being the primary filming element. However, due to Silicon Carbide emerging as superior in harsh environmental conditions, the research is gravitating towards it for industrial applications. This work presents a new analytical model for a polycrystalline silicon carbide-based capacitive pressure sensor working in touch-mode operation. Carbide demonstrates properties like electrical stability, mechanical robustness and chemical inertness which puts it on the frontier of research. The mathematical model proposed is a simple yet powerful tool in manipulating design and sizing for fast analysis. It is quicker and bypasses the need for complex simulation software. The analysis is purely mathematical and hence the results are analyzed with MATLAB. The mathematical model developed is verified with a standard Finite Element Analysis (FEM) using COMSOL v5.2. The results of the mathematical analysis dovetail well with the FEM analysis and show a significant improvement in both the sensitivity and capacitance generated.

Sumit Kumar Jindal

Department of Embedded Technology

School of Electronics Engineering

Vellore Campus

Aditya Varma M

Thukral D.

Vellore Institute of Technology (VIT) is a private university located in&nbsp;Tamil Nadu, India. Founded in 1984, as Vellore Engineering College, the institution offers 20 undergraduate, 34 postgraduate, four integrated and four research programs. It has campuses in Vellore, Amravati, Bhopal and Chennai.

VIT is one of the top ranked private universities in India according to NIRF, THE and QS Rankings.&nbsp;Govt. of India has recognized&nbsp;VIT, Vellore as an&nbsp;Institution of Eminence. This has allowed VIT to take independent quality initiatives and move up in world ranking.

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VIT University

Study of MEMS Touch-Mode Capacitive Pressure Sensor Utilizing Flexible SiC Circular Diaphragm: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison

Journal of Circuits, Systems and Computers

Capacitive Pressure Sensors have consistently been an indispensable application of MEMS (Micro Electro Mechanical Systems) because of their utility and precision. Silicon has proven to be a dominant material in MEMS based sensor design but it is unfit for applications operating in harsh environmental conditions. Silicon Carbide is a justified replacement to Silicon in these conditions due to its solitary attribute of robustness and high temperature tolerance. This work introduces a Silicon Carbide and Aluminum Nitride based DTMCPS (Double Touch Mode Capacitive Pressure Sensor) with a substrate notch. Condensed yet exhaustive step by step mathematics of key performance parameters have been detailed for the sensor under study. This is done to provide a detailed understanding of the underlying physical and mathematical principles. It also aims to provide a fast analysis model for prototyping the sensor to bypass the need for bulky simulation software. A Finite Element Analysis (FEM) analysis for the design was conducted using COMSOL and the results agree with the mathematical model. It is evident from numerical simulation and the FEM analysis that the proposed sensor provides better performance than comparable designs reported in literature. © 2018 Elsevier Ltd

Microelectronics Journal

Comprehensive assessment of MEMS double touch mode capacitive pressure sensor on utilization of SiC film as primary sensing element: Mathematical modelling and numerical simulation

An analytical model and numerical simulation for the performance of MEMS capacitive pressure sensors in both normal and touch modes is required for expected behavior of the sensor prior to their fabrication. Obtaining such information should be based on a complete analysis of performance parameters such as deflection of diaphragm, change of capacitance when the diaphragm deflects, and sensitivity of the sensor. In the literature, limited work has been carried out on the above-stated issue; moreover, due to approximation factors of polynomials, a tolerance error cannot be overseen. Reliable before-fabrication forecasting requires exact mathematical calculation of the parameters involved. A second-order polynomial equation is calculated mathematically for key performance parameters of both modes. This eliminates the approximation factor, and an exact result can be studied, maintaining high accuracy. The elimination of approximation factors and an approach of exact results are based on a new design parameter (δ) that we propose. The design parameter gives an initial hint to the designers on how the sensor will behave once it is fabricated. The complete work is aided by extensive mathematical detailing of all the parameters involved. Next, we verified our claims using MATLAB® simulation. Since MATLAB® effectively provides the simulation theory for the design approach, more complicated finite element method is not used. © 2017 Society of Photo-Optical Instrumentation Engineers (SPIE).

Journal of Micro/Nanolithography, MEMS, and MOEMS

Reliable before-fabrication forecasting of normal and touch mode MEMS capacitive pressure sensor: modeling and simulation

Microsystem Technologies

Capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modelling and simulation

A complete analytical model for clamped edge circular diaphragm non-touch and touch mode capacitive pressure sensor

A complete analytical model for circular diaphragm pressure sensor with freely supported edge

Journal	Journal of Circuits, Systems and Computers
Publisher	World Scientific Pub Co Pte Lt
ISSN	0218-1266
Open Access	0