The effect of rapid thermal annealing (RTA) on the optical properties of a 10 layer stacked InAs/GaAs quantum dot (QD) heterostructure where the QDs are overgrown with a combination of quaternary InAlGaAs and GaAs capping have been investigated. TEM micrographs showed that the shape of the QDs is preserved for annealing temperatures up to 800 °C. The peak emission wavelength of the investigated heterostructures remains stable on annealing at temperatures upto 750 °C, which is unusual in QD samples. This phenomenon is attributed due to the suppression of the strainenhanced intermixing in such structures. One of the reasons behind such suppression is the strain driven phase separation of Indium from the overgrown quaternary alloy, which maintains an In rich region across the QD periphery thereby checking the out-diffusion of Indium from the dots. The overlapping vertical strain from the under lying dot layers in the QD stack also maintains a strain relaxed state at the QD base, thereby preventing the material mixing at the base of the pyramidal QDs. This stability of wavelength is of paramount importance in optoelectronic devices where the design is based on the emission wavelength of the active region. Copyright © 2011 American Scientific Publishers All rights reserved.