The proposed work studies the synthesis, structural, and sensitivity of tin oxide films deposited by sputtering for a gas sensor. This includes an analysis of a tin oxide film doped with noble metal palladium. Gas sensitivity of the deposited layer is analysed as per the deposition parameters such as the thickness of the film, substrate temperature, argon–oxygen ratio of the sputtering environment, and duration and doping metal weight percentage into the tin oxide films and the results obtained are explained. © 2016 IETE.

Velmathi G

Electronics

School of Electronics Engineering

Chennai Campus

Mohan S

Henry R.

Vellore Institute of Technology (VIT) is a private university located in&nbsp;Tamil Nadu, India. Founded in 1984, as Vellore Engineering College, the institution offers 20 undergraduate, 34 postgraduate, four integrated and four research programs. It has campuses in Vellore, Amravati, Bhopal and Chennai.

VIT is one of the top ranked private universities in India according to NIRF, THE and QS Rankings.&nbsp;Govt. of India has recognized&nbsp;VIT, Vellore as an&nbsp;Institution of Eminence. This has allowed VIT to take independent quality initiatives and move up in world ranking.

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VIT University

Tin Oxide Film Deposition and Characterization for a Chemoresistive Gas Sensor

IETE Journal of Research

Different type of mechanisms of gas sensing, various factors that affect the mechanisms, ways to improve the gas sensitivity, state of the art of fabrication techniques and materials used are reviewed. The work also discusses a novel type of gas sensor derived based on the reviewed mechanisms and materials. The development of semiconductor-based gas sensors using tin oxide which is simple to implement, low cost and offering good stability and sensitivity is discussed. © 2016 IETE.

IETE Technical Review

Analysis and Review of Tin Oxide-Based Chemoresistive Gas Sensor

Analysis of Factors for Improving Functionality of Tin Oxide Gas Sensor

Critical Reviews in Solid State and Materials Sciences

Oxide Materials for Development of Integrated Gas Sensors—A Comprehensive Review

Sensors and Actuators B: Chemical

Synthesis and characterization of sol–gel derived nanocrystalline tin oxide thin film as hydrogen sensor

Journal	IETE Journal of Research
Publisher	Informa UK Limited
ISSN	0377-2063
Open Access	No