Nd-Fe-B thin films were prepared by electron cyclotron resonance (ECR) ion beam sputtering and subsequent annealing. The influence of annealing on the magnetic properties and X-ray diffraction patterns of the product films was investigated. Amorphous films deposited at room temperature were annealed at temperatures between 600 and 800 °C. The c-axis oriented crystallization of the Nd2Fe14B phase did not appear by annealing of the buffer layer and magnetic Nd-Fe-B layer deposited at room temperature, and the hysteresis loops of the films indicated magnetic isotropy. © 2009 IOP Publishing Ltd.