Transparent conducting molybdenum doped indium oxide (In2O 3: Mo) thin films with high performance have been deposited on glass substrates at 300°C by activated reactive evaporation technique and the effect of molybdenum content on the physical properties of the deposited films had been studied using spectrophotometer and van der Pauw methods. The films exhibited a lower electrical resistivity of 7.2×10-4 Ωcm and an average spectral transmittance of 83 % in visible region with an optical band gap of 3.68 eV. © 2008 American Institute of Physics.