Kalainathan S

Department of Physics

School of Advanced Sciences

Vellore Campus

Irudayaraj A.A

Kuppusami P

Vellore Institute of Technology (VIT) is a private university located in&nbsp;Tamil Nadu, India. Founded in 1984, as Vellore Engineering College, the institution offers 20 undergraduate, 34 postgraduate, four integrated and four research programs. It has campuses in Vellore, Amravati, Bhopal and Chennai.

VIT is one of the top ranked private universities in India according to NIRF, THE and QS Rankings.&nbsp;Govt. of India has recognized&nbsp;VIT, Vellore as an&nbsp;Institution of Eminence. This has allowed VIT to take independent quality initiatives and move up in world ranking.

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VIT University

Structural properties and electrical resistivity of TiNx and Ti1−xAlxN films prepared by reactive dc magnetron sputtering: effect of nitrogen flowrate

Surface Engineering

Influence of nitrogen flow rate on growth of TiAlN films prepared by DC magnetron sputtering

Surface and Coatings Technology

Deposition of TiN films on various substrates from alkoxide solution by plasma-enhanced CVD

Materials Letters

Effect of N2 partial pressure on the microstructure and mechanical properties of reactively sputtered (Ti,Al)N coatings

Effect of nitrogen flow rate on structure and properties of nanocrystalline TiN thin films produced by unbalanced magnetron sputtering

Influence of nitrogen content on the structural, mechanical and electrical properties of TiN thin films

Structural properties and electrical resistivity of TiNxand Ti1−xAlxN films prepared by reactive dc magnetron sputtering: effect of nitrogen flowrate

Journal	Surface Engineering
Publisher	Informa UK Limited
ISSN	0267-0844
Open Access	0