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The influence of N2 flow rate and substrate temperature on Ti1-xAlxN thin films
Albert Irudayaraj A,
Published in Wiley
2008
Volume: 43
   
Issue: 7
Pages: 709 - 712
About the journal
JournalData powered by TypesetCrystal Research and Technology
PublisherData powered by TypesetWiley
ISSN0232-1300
Open Access0