In this paper, we report the fabrication of TiO2 metal insulator metal capacitor using various electrolytes in anodization process. The capacitors exhibit a high capacitance density of &gt;30 fF/μm2. We have discussed the effect of different electrolyte solutions on the electrical and structural properties of anodized TiO2 MIM Capacitors. © 2013 American Scientific Publishers. All rights reserved.

Karthik R

Electronics

School of Electronics Engineering

Chennai Campus

Kannadassan D

Department of Communication Engineering

Vellore Campus

Partha Sharathi Mallick

Department of Instrumentation

School of Electrical Engineering

R. Karthik

D. Kannadassan

Maryam Shojaei Baghini

P.S. Mallick

Baghini M.S

anodization

Frequency dependent capacitance

high-k

MIM capacitor

Titania

Vellore Institute of Technology (VIT) is a private university located in&nbsp;Tamil Nadu, India. Founded in 1984, as Vellore Engineering College, the institution offers 20 undergraduate, 34 postgraduate, four integrated and four research programs. It has campuses in Vellore, Amravati, Bhopal and Chennai.

VIT is one of the top ranked private universities in India according to NIRF, THE and QS Rankings.&nbsp;Govt. of India has recognized&nbsp;VIT, Vellore as an&nbsp;Institution of Eminence. This has allowed VIT to take independent quality initiatives and move up in world ranking.

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VIT University

Journal of Nanoelectronics and Optoelectronics

This paper presents the fabrication of Al2O3/TiO2/Al2O3 metal-insulator-metal (MIM) capacitor using anodization technique. High capacitance density of &gt;3.5 fF/μm2, low quadratic voltage coefficient of capacitance of &lt;115 ppm/V2 and a low leakage current density of 4.457×10-11 A/cm2 at 3 V are achieved which are suitable for analog and mixed signal applications. We found that the anodization voltage played a major role in electrical and structural properties of the thin film. This work suggests that the anodization method can offer crystalline multilayer dielectric stack required for high performance MIM capacitor. Copyright © 2015 American Scientific Publishers All rights reserved.

Journal of Nanoscience and Nanotechnology

Nanostructured anodic multilayer dielectric stacked metal-insulator-metal capacitors

Effect of electrolyte on the performance of anodic titania metal-insulator-metal capacitors

Journal	Journal of Nanoelectronics and Optoelectronics
Publisher	AMER SCIENTIFIC PUBLISHERS
ISSN	1555130X
Open Access	No